Payment Terms | T/T |
Delivery Time | 2-4 weeks |
Packaging Details | package in 100-grade cleaning room |
Coefficient of Thermal Expansion | ~4.5×10⁻⁶/°C |
Thermal Conductivity | ~45 W/(m·K) (@1200°C) |
Flexural Strength | >250 MPa |
Mohs Hardness | 9.5 |
Working Atmosphere | Oxygen, nitrogen, hydrogen chloride, etc. |
Chemical Stability | Resists acid/alkali and plasma erosion |
Brand Name | ZMSH |
Model Number | SiC Horizontal Furnace Tube |
Certification | rohs |
Place of Origin | CHINA |
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Product Specification
Payment Terms | T/T | Delivery Time | 2-4 weeks |
Packaging Details | package in 100-grade cleaning room | Coefficient of Thermal Expansion | ~4.5×10⁻⁶/°C |
Thermal Conductivity | ~45 W/(m·K) (@1200°C) | Flexural Strength | >250 MPa |
Mohs Hardness | 9.5 | Working Atmosphere | Oxygen, nitrogen, hydrogen chloride, etc. |
Chemical Stability | Resists acid/alkali and plasma erosion | Brand Name | ZMSH |
Model Number | SiC Horizontal Furnace Tube | Certification | rohs |
Place of Origin | CHINA |
A Silicon Carbide (SiC) Horizontal Furnace Tube is a high-performance ceramic tube manufactured using reaction sintering or chemical vapor deposition (CVD) processes, specifically designed for high-temperature and corrosive industrial environments. It serves as a process tube, operating in atmospheres containing oxygen, nitrogen, and trace hydrogen chloride, with a typical working temperature of 1250°C and the capability to withstand even higher temperatures. Its core value lies in leveraging the intrinsic properties of silicon carbide—extremely high hardness, high stiffness, low coefficient of thermal expansion, high thermal conductivity, and exceptional chemical stability—to ensure outstanding dimensional stability, structural integrity, and long service life under extreme conditions of heat, corrosion, and thermal shock. This provides a reliable high-temperature processing environment for advanced industries such as semiconductor manufacturing and metallurgy.
Parameter Category | Parameter Name | Typical Value/Range | Significance |
Material Characteristics | Coefficient of Thermal Expansion | ~4.5×10⁻⁶/°C | Extremely low thermal expansion ensures dimensional stability at high temperatures and excellent thermal shock resistance.
|
Thermal Conductivity | ~45 W/(m·K) (@1200°C) | High thermal conductivity facilitates rapid temperature equalization and reduces thermal gradients.
| |
Flexural Strength | >250 MPa | High mechanical strength resists deformation and ensures structural stability.
| |
Maximum Service Temperature | >1700°C (oxidizing atmosphere) | Resistance to extreme temperatures adapts to high-temperature industrial environments.
| |
Mohs Hardness | 9.5 | High hardness endows the component with exceptional wear resistance and long life.
| |
Functional Characteristics | Working Atmosphere | Oxygen, nitrogen, hydrogen chloride, etc. | Adapts to process atmospheres common in semiconductor and photovoltaic industries.
|
Chemical Stability | Resists acid/alkali and plasma erosion | Excellent chemical inertness suitable for harsh chemical environments.
|
Silicon Carbide Horizontal Furnace Tubes play a critical role in multiple high-end manufacturing sectors due to their superior performance:
3D printed integrated forming
Base material impurity content <300 ppm
CVD silicon carbide coating base material impurity content <5 ppm
High thermal conductivity
High thermal shock stability
ZMSH supports precision custom machining of various silicon carbide (SiC) ceramic products. Whether for special dimensions, complex structures, or specific performance requirements, we can achieve them through processes such as reaction sintering, pressureless sintering, and chemical vapor deposition (CVD). If you have needs for silicon carbide ceramic component design, material selection, or application scenario adaptation, please feel free to inquire. We will provide technical solutions and rapid response services.
Q1: What is the primary application of a silicon carbide horizontal furnace tube?
A1: It is primarily used in high-temperature processes (up to 1700°C) within semiconductor manufacturing and photovoltaic industries, such as diffusion, oxidation, and chemical vapor deposition (CVD), ensuring precise thermal treatment and coating uniformity for wafers and solar cells.
Q2: Why choose silicon carbide over traditional materials for horizontal furnace tubes?
A2: Silicon carbide offers exceptional thermal stability (low CTE ~4.5×10⁻⁶/℃), high thermal conductivity (~45 W/m·K at 1200°C), and superior chemical inertness, enabling longer service life, reduced maintenance costs, and reliable performance in corrosive atmospheres (e.g., oxygen, nitrogen, HCl) compared to quartz or metal alternatives.
Tags: #SiC Horizontal Furnace Tube, #CVD Coating, #High-Purity, #Customized, #SiC Ceramics, #Process Tube, #High Thermal Conductivity
Company Details
Business Type:
Manufacturer,Agent,Importer,Exporter,Trading Company
Year Established:
2013
Total Annual:
1000000-1500000
Ecer Certification:
Verified Supplier
SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components wi... SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components wi...
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