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SHANGHAI FAMOUS TRADE CO.,LTD

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China SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0
China SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0

  1. China SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0
  2. China SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0
  3. China SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0

SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0

  1. MOQ: 5
  2. Price: By case
  3. Get Latest Price
Payment Terms T/T
Delivery Time 2-4 weeks
Packaging Details package in 100-grade cleaning room
Material Purity SiC ≥ 99.999%
Thermal Conductivity 120–270 W/(m·K)
Refractive Index 2.6–2.7
Surface Flatness ≤1 μm
Surface Roughness (Ra)​​ ≤0.01 μm
Operating Temperature -50℃ ~ 500℃
Brand Name ZMSH
Model Number SiC Ceramic Optical Path Board
Certification rohs
Place of Origin CHINA

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  1. Product Details
  2. Company Details

Product Specification

Payment Terms T/T Delivery Time 2-4 weeks
Packaging Details package in 100-grade cleaning room Material Purity SiC ≥ 99.999%
Thermal Conductivity 120–270 W/(m·K) Refractive Index 2.6–2.7
Surface Flatness ≤1 μm Surface Roughness (Ra)​​ ≤0.01 μm
Operating Temperature -50℃ ~ 500℃ Brand Name ZMSH
Model Number SiC Ceramic Optical Path Board Certification rohs
Place of Origin CHINA

​​SiC Ceramic Optical Path Board Introduction

 

 

SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0.02mm​​

 

 

 

 

A Silicon Carbide (SiC) Optical Path Board is a high-precision optical substrate manufactured from ​​ultra-high-purity silicon carbide ceramic​​, specifically designed for ​​dual optical path systems​​ in ​​wafer inspection equipment​​. It leverages the core material properties of silicon carbide—​​exceptional hardness, ultra-low coefficient of thermal expansion, high thermal conductivity, and high refractive index​​—to provide a ​​stable, thermally stable reference platform​​ for optical sensors and imaging systems. Through ​​precision grinding and polishing processes​​, it achieves ​​nanoscale flatness and surface roughness​​. Its ​​excellent chemical inertness​​ and ​​high stiffness ensure long-term performance in harsh semiconductor manufacturing environments, significantly enhancing inspection accuracy and equipment reliability.

 

 


 

​​SiC Ceramic Optical Path Board Key Technical Data

 
 

​​Parameter Category​​

​​Parameter Name​​

Typical Value/Range​​

Material Characteristics​​

Material Purity

SiC ≥99.999%

Coefficient of Thermal Expansion

~4.5×10⁻⁶/℃

Thermal Conductivity

120–270 W/(m·K)

Refractive Index

2.6–2.7

Elastic Modulus

>400 GPa

Functional Characteristics​​

Surface Flatness

≤1 μm

Surface Roughness (Ra)

≤0.01 μm

Operating Temperature

-50℃ ~ 500℃

 
 

 

SiC Ceramic Optical Path Board Characteristics

 
 
​​Feature Category​​ ​​Parameter Name​​ ​​Value/Specification​​
​​Weight Optimization​​ Ultra-Lightweight

Achieved via structural design and material selection

 

​​Environmental Stability​​ Ultra-High Stability

Exceptional resistance to thermal/mechanical stress

 

​​Thermal Performance​​ Coefficient of Thermal Expansion

Ultra-Low (e.g., ~4.5×10⁻⁶/℃)

 

​​Mechanical Property​​ Stiffness

High (e.g., Elastic Modulus >400 GPa)

 

​​Material Integrity​​ Density

High (e.g., ≥3.1 g/cm³)

 

​​Precision Metrics​​ Surface Flatness & Parallelism

≤0.02 mm

 

​​Dimensional Capability​​ Maximum Size

900 × 900 mm

 

 

 


 

SiC Ceramic Optical Path Board Main Application Areas


 

Silicon Carbide Optical Path Boards are critically applied in the following high-end fields due to their outstanding performance:

  1. ​​Semiconductor Inspection Equipment​​: Serves as the ​​core substrate​​ in ​​dual optical path systems​​ for ​​wafer defect detection, film thickness measurement, and overlay accuracy analysis​​, ensuring optical path stability and measurement repeatability.
  2. ​​AR/VR Optical Systems​​: Used as a ​​diffractive waveguide lens substrate​​ (e.g., Meta Orion AR glasses), supporting ​​wide field of view (70°+), low rainbow artifact display, and lightweight design (density ~3.1 g/cm³)​​.
  3. ​​High-End Photoelectric Instruments​​: Functions as an ​​optical platform​​ in ​​laser interferometers and spectral analysis equipment​​, reducing thermal drift and environmental vibration impacts on precision.
  4. ​​Photovoltaics and New Energy​​: Applied as a ​​heat dissipation substrate​​ for ​​photovoltaic inverter power modules​​, utilizing its high thermal conductivity to improve cooling efficiency.

 

 


 

About ZMSH

 

 

ZMSH specializes in the customized services of silicon carbide (SiC) optical path boards. With ​​sufficient reserves of ultra-high-purity silicon carbide raw materials​​ (purity ≥99.999%), and leveraging ​​advanced pressureless sintering and precision machining technologies​​ (such as nanoscale mirror polishing and micro-channel processing), it can precisely control product performance. The company is equipped with ​​fully automated production lines and a strict quality inspection system​​, supporting ​​one-stop customization​​ from design, prototyping to mass production, covering personalized needs for dimensions, shapes, hole positions, and functional characteristics (e.g., flatness ≤0.02mm). Simultaneously, we possess a ​​comprehensive global logistics network and a rapid response mechanism​​ to ensure efficient order delivery, providing ​​high-reliability and high-performance silicon carbide ceramic solutions​​ for fields such as semiconductors, optoelectronics, and new energy.

 

 

 

 

 


 

Q&A

 

1. Q: What are the key advantages of silicon carbide (SiC) optical path boards?​​

​​    A:​​ They offer ​​ultra-low thermal expansion (~4.5×10⁻⁶/℃), high thermal conductivity (120–270 W/m·K), and exceptional stiffness (>400 GPa)​​, ensuring ​​nanoscale flatness (≤0.02mm) and stability​​ under extreme conditions for precision optical systems.

 

 

​​2. Q: Where are silicon carbide optical path boards commonly used?​​

​​    A:​​ They are primarily used in ​​semiconductor wafer inspection equipment (e.g., dual-optical-path baseplates), AR/VR waveguide substrates, laser interferometers, and high-power photonic devices​​ due to their ability to maintain ​​optical alignment and thermal stability​​.

 

 


Tags: #SiC Ceramic Optical Path Board, #Customized, #Wafer Inspection Equipment, #Parallelism ≤0.02mm​​

   
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Company Details

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  • Business Type:

    Manufacturer,Agent,Importer,Exporter,Trading Company

  • Year Established:

    2013

  • Total Annual:

    1000000-1500000

  • Ecer Certification:

    Verified Supplier

    SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014.    We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components wi...     SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014.    We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components wi...

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  • SHANGHAI FAMOUS TRADE CO.,LTD
  • Room.1-1805,No.1079 Dianshanhu Road,Qingpu Area Shanghai city, China /201799
  • https://www.galliumnitridewafer.com/

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