SHANGHAI FAMOUS TRADE CO.,LTD
| Payment Terms | T/T |
| Supply Ability | 1000pcs per month |
| Delivery Time | 5-8weeks |
| Packaging Details | Package in 100-grade cleaning room |
| Diameter | 3 inch (76.2mm) |
| Thickness Tolerance | ±0.02mm |
| Surface Roughness | ≤1nm (Polished Grade) |
| Transmittance @193nm | >92% |
| CTE (RT-300°C) | 0.55×10⁻⁶/°C |
| Applications | Semiconductor Manufacturing,High-power Lasers |
| Brand Name | ZMSH |
| Model Number | 3 Inch Quartz Wafer |
| Certification | rohs |
| Place of Origin | CHINA |
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Product Specification
| Payment Terms | T/T | Supply Ability | 1000pcs per month |
| Delivery Time | 5-8weeks | Packaging Details | Package in 100-grade cleaning room |
| Diameter | 3 inch (76.2mm) | Thickness Tolerance | ±0.02mm |
| Surface Roughness | ≤1nm (Polished Grade) | Transmittance @193nm | >92% |
| CTE (RT-300°C) | 0.55×10⁻⁶/°C | Applications | Semiconductor Manufacturing,High-power Lasers |
| Brand Name | ZMSH | Model Number | 3 Inch Quartz Wafer |
| Certification | rohs | Place of Origin | CHINA |
| High Light | High Purity Quartz Substrate ，3 Inch Quartz Substrate ，76.2mm Quartz Substrate | ||
The 3-inch quartz wafer (76.2mm) is a large-format, high-purity fused silica substrate specifically designed for advanced semiconductor, optoelectronic, and precision optical applications requiring larger processing areas. Compared to 2-inch wafers, the 3-inch specification enhances production efficiency and reduces edge loss, making it particularly suitable for batch-manufactured MEMS devices, advanced photomasks, and laser optical systems.
ZMSH specializes in customized production of large-size quartz wafers, offering:
· Full Size Coverage: From 2-inch to 12-inch wafers, supporting non-standard size customization
· Complex Shape Processing: Round wafers, square plates, and special-shaped cuts (e.g., sector-shaped, D-cut)
· Multi-functional Surface Treatment: Single/double-side polishing, coatings (AR/IR/DLC), micro-structure etching
· Industry Solutions: Semiconductor-grade cleanliness (Class 100), laser drilling, high-precision alignment marks
| Parameter | Specification |
| Diameter | 3 inch (76.2mm) |
| Thickness Tolerance | ±0.02mm |
| Surface Roughness | ≤1nm (Polished Grade) |
| Transmittance @193nm | >92% |
| CTE (RT-300°C) | 0.55×10⁻⁶/°C |
| Parallelism | ≤5μm |
| Vacuum Compatibility | 10⁻⁹ Torr |
- Large-size Homogeneity: TTV≤15μm at 76.2mm diameter ensures process uniformity across large areas
- Deep UV Optimization: >92% transmittance at 193nm, supporting ArF lithography and DUV laser applications
- Thermal Shock Resistance: Thermal expansion coefficient 0.55×10⁻⁶/°C, withstands rapid temperature cycling (1000°C/min)
- Chemical-grade Inertness: Plasma erosion resistant, suitable for dry etching and CMP environments
- Mechanical Reinforcement: Optional chemical strengthening increases flexural strength by 300% to 500MPa
| Field | Specific Applications |
| Semiconductor Manufacturing | Large-format photomask substrates, EUV lithography optics, 3D IC interposers |
| High-power Lasers | Laser resonator mirrors, kW-level fiber laser end caps, ultrafast laser pulse compression grating substrates |
| Quantum Technology | Qubit carrier wafers, cold atom chip vacuum viewports |
| Aerospace | Satellite optical payload windows, radiation-resistant sensor protection covers |
| Biomedical | Microfluidic chip masters, DNA sequencing chip substrates, endoscope light guides |
ZMSH provides quartz prism customization services for UV to IR wavelengths, including right-angle prisms, pentaprisms, and beam splitter prisms, featuring:
· Nanometer-level Surface Accuracy (λ/10@632.8nm)
· Special Coatings (laser damage-resistant coatings, polarizing beam splitter coatings)
· Integrated Processing (prism-wafer hybrid structures, microchannel cooling designs)
Ideal for cutting-edge applications in laser beam shaping, spectral analysis, and high-energy physics experiments.
1. Q: What are the advantages of 3-inch quartz wafers over smaller sizes?
A: 3-inch (76.2mm) quartz wafers provide 44% more usable area than 2-inch wafers, reducing edge loss and increasing throughput for MEMS manufacturing and optical coating processes.
2. Q: How to handle and store 3-inch fused silica wafers properly?
A: Always use cleanroom-grade wafer carriers with edge-contact supports, and store in Class 100 environments with <40% RH to prevent surface contamination and moisture absorption.
Tag: #3 Inch Quartz Substrate, #Customized, #Fused Silica Plates, #SiO₂ Crystal, #Quartz wafers, #JGS1/JGS2 Grade, # High-Purity, #Fused Silica Optical Components, #Quartz Glass Plate, #Custom-Shaped Through-Holes, #3 Inch Quartz Substrate, #76.2mm Diameter
Company Details
Business Type:
Manufacturer,Agent,Importer,Exporter,Trading Company
Year Established:
2013
Total Annual:
1000000-1500000
Ecer Certification：
Verified Supplier
SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components wi... SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components wi...
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