GUANGZHOU JETEX-LLOYD'S MACHINERY LTD
| Payment Terms | Western Union,MoneyGram,T/T |
| Supply Ability | 1000 units per month |
| Delivery Time | According to your order |
| Packaging Details | Specialized packaging film |
| Air volume | 2000m³/h-300000m³/h |
| Function | Cooling, heating, humidifying, dehumidifying, filtering, purifying and sterilizing |
| Panel material | Double-layer insulation , color steel sheet , galvanized steel sheet, stainless steel sheet(Optional)l |
| Name | Modular Air Handling Units |
| Fan | Volute/Non-volute Fan /EC fan options available |
| Cooling capacity | 12kw-5000kw |
| Insulated material | polyurethane foam,thickness(50mm) |
| Brand Name | JETEX |
| Model Number | AHS series |
| Certification | ISO quality system certification/CRAA |
| Place of Origin | Guangzhou, Guangdong, China |
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Product Specification
| Payment Terms | Western Union,MoneyGram,T/T | Supply Ability | 1000 units per month |
| Delivery Time | According to your order | Packaging Details | Specialized packaging film |
| Air volume | 2000m³/h-300000m³/h | Function | Cooling, heating, humidifying, dehumidifying, filtering, purifying and sterilizing |
| Panel material | Double-layer insulation , color steel sheet , galvanized steel sheet, stainless steel sheet(Optional)l | Name | Modular Air Handling Units |
| Fan | Volute/Non-volute Fan /EC fan options available | Cooling capacity | 12kw-5000kw |
| Insulated material | polyurethane foam,thickness(50mm) | Brand Name | JETEX |
| Model Number | AHS series | Certification | ISO quality system certification/CRAA |
| Place of Origin | Guangzhou, Guangdong, China | ||
| High Light | semiconductor industry air handlers ，JETEX air handling units ，industrial air conditioner for semiconductors | ||
Advanced Functions of AHUs in Semiconductor Fabs
Multi-Stage Filtration
AHUs integrate HEPA/ULPA filters to achieve ISO Class 1-5 cleanroom standards, removing particles as small as 0.1–0.3 microns.
Chemical filtration (e.g., activated carbon) may be added to absorb airborne molecular contaminants (AMCs) like acids, dopants, or solvents.
Pressure Cascade Control
Maintains positive/negative pressure gradients between cleanroom zones to prevent cross-contamination.
Critical in photolithography and etching areas where airborne particles can ruin wafers.
Redundancy and Reliability
N+1 redundancy is common to ensure uninterrupted operation—a single AHU failure can cost millions in lost yield.
Backup systems (e.g., dual fans, emergency power) are critical for 24/7 fabs.
Recirculation vs. Once-Through Airflow
Recirculating AHUs (90–95% air reuse) save energy but require rigorous filtration.
Make-Up Air Units (MAUs) supply fresh, conditioned air to offset exhaust from tools (e.g., scrubbers, process chambers).
Energy Efficiency Innovations
Semiconductor fabs consume 2–4% of global industrial electricity, with HVAC accounting for ~30–50% of a fab’s energy use.
AHU optimizations include:
Variable Frequency Drives (VFDs): Adjust fan speeds based on real-time demand.
Heat Recovery Systems: Capture waste heat from process exhaust to pre-condition incoming air.
AI/ML-Based Control: Predictive algorithms optimize airflow, temperature, and humidity setpoints.
EC (Electronically Commutated) Fans: More efficient than traditional AC fans.
Challenges in AHU Design
Process Sensitivity: Advanced nodes (e.g., 3nm, GAAFETs) require tighter tolerances (e.g., ±0.1°C temp, ±1% RH).
Chemical Compatibility: AHUs must resist corrosion from aggressive chemicals (e.g., HF, NH₃).
Scalability: AHUs must adapt to fab expansions or process changes
Future Trends
Smart AHUs: IoT-enabled sensors monitor filter life, airflow, and energy use in real time.
Sustainable Designs: Heat pumps, liquid desiccant dehumidification, and renewable energy integration.
Modular AHUs: Pre-fabricated units for faster installation in new fabs .
| Model NO. | Jetex AHS series |
| Type | Modular air Handling Unit/air handler |
| Frame structure | Aluminum alloy |
| Air pipe Material | Galvanized |
| Mounting | Vertical or ceiling mounted |
| Operating Voltage | 380/400 VAC |
| Air volume | 2000~100000 m³/h |
| Lifetime | About 15 years |
| Fan Type | EC fan /belt drive volute fan |
| Panel sheet material | Colored steel sheet and galvanized sheet 0.5mm |
| Insulated polyurethane foam thickness | 50mm |
| Functions | Cooling, heating, humidifying, dehumidifying, filtering, purifying and sterilizing,ventilation .etc. |
| Power supply | 380V/50HZ/3P |
| Cooling capacity | 12kw-5000kw |
| Numbers of row | 2 rows/6 rows /8 rows |
FAQ
Q1:Can you manufacture non-standard machine?
A1:Sure, our factory has 30 years experience in manufacturing, You just need to give us technology parameters,our engineers will give you worked out.
Q2:How about the quality of your product?
A2:Our products manufactured strictly according to national and international standard.We have CE ,CRAA certification -- We take a test on every product before shipment.
Q3:How to choose a suitable machine?
A3:Please let us know your specification and building drawing , our professional technical engineerswill service you .
Company Details
Business Type:
Manufacturer
Year Established:
1995
Total Annual:
8000000-13000000
Employee Number:
50~120
Ecer Certification：
Verified Supplier
Founded in 1995,Guangzhou Jetex-Lloyd's Machinery Ltd is an energy-saving and environmentally friendly technology enterprise specializing in the R&D, manufacturing, sales, and service of HVAC, air handling units, and related products. The company upholds the management concept... Founded in 1995,Guangzhou Jetex-Lloyd's Machinery Ltd is an energy-saving and environmentally friendly technology enterprise specializing in the R&D, manufacturing, sales, and service of HVAC, air handling units, and related products. The company upholds the management concept...
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