Delivery Time | Negotiable |
Payment Terms | Negotiable |
Max Operating Temperature | 1700°C |
Flexural Strength | 350 MPa |
Dielectric Loss | 0.0002 |
Method | lsostatic presure |
Dimensional Tolerance | ±0.001 mm |
Machinability | Difficult |
Mechanical Strength | High |
Alumina Content | 95% |
Tensile Strength | 200 MPa |
Type | Alumina Ceramic Parts |
Size | Customized |
Dielectric Constant | 9.8 |
Materials | 92% alumina powder |
Surface Finish | Polished |
Thermal Expansion Coefficient | 8.5 x 10^-6 /K |
Place of Origin | Made In China |
Brand Name | Dayoo |
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Product Specification
Delivery Time | Negotiable | Payment Terms | Negotiable |
Max Operating Temperature | 1700°C | Flexural Strength | 350 MPa |
Dielectric Loss | 0.0002 | Method | lsostatic presure |
Dimensional Tolerance | ±0.001 mm | Machinability | Difficult |
Mechanical Strength | High | Alumina Content | 95% |
Tensile Strength | 200 MPa | Type | Alumina Ceramic Parts |
Size | Customized | Dielectric Constant | 9.8 |
Materials | 92% alumina powder | Surface Finish | Polished |
Thermal Expansion Coefficient | 8.5 x 10^-6 /K | Place of Origin | Made In China |
Brand Name | Dayoo | ||
High Light | Spuare Alumina Products ,Spuare Type Alumina Products |
Insulation Performance Alumina Ceramic Bases For Precision Measurement Equipment And Industrial Inspection
These alumina ceramic support bases are manufactured using 99.6% high-purity Al₂O₃ material, specifically designed for semiconductor, optical, and precision measurement equipment. Featuring ultra-high flatness of 0.01mm/m and a thermal expansion coefficient of 7.2×10⁻⁶/℃, the products maintain exceptional dimensional stability in extreme temperatures (-60℃~1500℃) and vacuum environments (≤10⁻⁸Pa).
Semiconductor Equipment: Lithography wafer stages, etching reactor chamber bases
Precision Optics: Laser interferometer reference platforms, space telescope mirror mounts
Analytical Instruments: Electron microscope sample stages, mass spectrometer ion source supports
Industrial Inspection: CMM machine bases, roundness tester turntables
New Energy: Fuel cell stack supports, photovoltaic coating equipment carriers
Characteristic | Technical Specification | Application Value |
---|---|---|
Thermal Stability | ΔL/L<0.001%/℃ | Eliminates thermal drift errors |
Vacuum Compatibility | Outgassing rate<10⁻¹¹Pa·m³/s | Maintains ultra-high vacuum |
Mechanical Strength | Flexural strength>400MPa | Supports precision components without deformation |
Insulation Performance | Volume resistance>10¹⁶Ω·cm | Eliminates electrical leakage interference |
Parameter | Standard Type | High-Precision Type |
---|---|---|
Material Purity | 99.6% Al₂O₃ | 99.9% Al₂O₃ |
Flatness | ≤0.02mm/m | ≤0.005mm/m |
Surface Roughness | Ra0.1μm | Ra0.025μm |
Thermal Expansion Coefficient | 7.5×10⁻⁶/℃ | 7.2×10⁻⁶/℃ |
Vacuum Leak Rate | <10⁻¹⁰mbar·L/s | <10⁻¹¹mbar·L/s |
Powder Processing: 0.1μm high-purity powder with spray granulation
Forming Process: Isostatic pressing (300MPa) combined with CNC green machining
Sintering Technology: Gradient sintering at 1700℃ in hydrogen atmosphere
Precision Machining:
5-axis grinding (±0.002mm)
Magnetorheological polishing (surface accuracy λ/20@632.8nm)
Cleanroom Processing: Assembly completed in Class 100 cleanroom
Full Inspection: Laser interferometer + CMM complete dimensional inspection
Installation Requirements:
✓ Use torque wrench (recommended value 1.5±0.2N·m)
✓ Use dedicated cleanroom tools
✓ Recommended thermal matching pre-adjustment (temperature gradient <2℃/min)
Environmental Limitations:
✗ Avoid contact with hydrofluoric acid
✗ Avoid thermal shocks >200℃/min
✗ Not suitable for continuous >1600℃ oxidizing environments
Technical Support: Free FEA stress analysis
Rapid Response: 72-hour expedited service
Traceability Management: 10-year complete production records
Certification Support: SEMI/FDA/ISO certification documents provided
Q: How to ensure thermal matching with silicon carbide components?
A: CTE gradient transition design available (adjustable 7.2-4.5×10⁻⁶/℃)
Q: Maximum processable dimensions?
A: Current technical limit 500×500×100mm (special tooling required)
Q: Is conductive modification supported?
A: Customizable antistatic versions with surface resistance 10⁴-10¹⁰Ω
Q: How is wafer-level cleanliness guaranteed?
A: Final sterilization with VHP (vaporized hydrogen peroxide)
Company Details
Business Type:
Manufacturer,Distributor/Wholesaler,Exporter
Total Annual:
>1000000
Employee Number:
>100
Ecer Certification:
Verified Supplier
We are a company with many years of experience in the production of special precision ceramics and the ability to design, manufacture, process and sell structural and functional parts of various special precision ceramics. Deyu Precision Ceramics Technology Co., Ltd. has many years of e... We are a company with many years of experience in the production of special precision ceramics and the ability to design, manufacture, process and sell structural and functional parts of various special precision ceramics. Deyu Precision Ceramics Technology Co., Ltd. has many years of e...
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