SHANGHAI FAMOUS TRADE CO.,LTD
| Payment Terms | T/T |
| Delivery Time | 2-4 weeks |
| Packaging Details | package in 100-grade cleaning room |
| Primary Material | Ultra-high-purity SiC |
| Density | ~3.0 – 3.2 g/cm³ |
| Elastic Modulus | >400 GPa |
| Mohs Hardness | 9.5 |
| Surface Roughness (Ra, DSP) | ≤ 0.5 nm |
| Coefficient of Thermal Expansion | ~4.5×10⁻⁶/℃ |
| Brand Name | ZMSH |
| Model Number | SiC Mirror |
| Certification | rohs |
| Place of Origin | CHINA |
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Product Specification
| Payment Terms | T/T | Delivery Time | 2-4 weeks |
| Packaging Details | package in 100-grade cleaning room | Primary Material | Ultra-high-purity SiC |
| Density | ~3.0 – 3.2 g/cm³ | Elastic Modulus | >400 GPa |
| Mohs Hardness | 9.5 | Surface Roughness (Ra, DSP) | ≤ 0.5 nm |
| Coefficient of Thermal Expansion | ~4.5×10⁻⁶/℃ | Brand Name | ZMSH |
| Model Number | SiC Mirror | Certification | rohs |
| Place of Origin | CHINA |
Double-Side Polished High-Purity SiC Mirror Optical Component for MEMS Micromirror
A Small-Size Double-Side Polished Silicon Carbide (SiC) Mirror is a high-performance optical component manufactured from ultra-high-purity silicon carbide (SiC) ceramic through precision machining and double-side polishing (DSP) technology. Its core features include compact dimensions (typically ≤50mm in diameter or side length) and nanoscale surface finish on both sides, specifically designed for modern high-end optoelectronic systems with extreme requirements for size, weight, stability, and optical precision. Leveraging the inherent properties of silicon carbide—ultra-high hardness, high stiffness, low thermal expansion, high thermal conductivity, and exceptional chemical stability—it is produced via processes such as reaction sintering, chemical vapor deposition (CVD), or pressureless sintering. The implementation of double-side ultra-precision polishing (surface roughness Ra typically ≤0.5 nm) enables it to serve as a core component in many compact precision optical devices.
1. Ultra-Lightweight & Miniaturization:
2. Superior Stability & Environmental Resistance:
3. Excellent Thermal Management:
4. Top-Tier Optical Surface Quality:
5. Outstanding Durability & Chemical Inertness:
Small-size double-side polished SiC mirrors are critically used in the following high-end fields due to their unique advantages:
AR/MR Glasses Optical Systems:
As diffractive waveguide lenses, prisms, or reflectors for guiding and displaying light paths. Their high refractive index (~2.65), lightweight, and small size are key to achieving slim glasses design, large field of view (FOV), and elimination of rainbow patterns.
As reflectors or lens substrates in the illumination systems of lithography machines or sensors of wafer inspection equipment. Their high thermal stability and flatness are crucial for maintaining nanoscale overlay accuracy and inspection precision.
Used in laser galvanometers, laser interferometers, or as reflectors/window mirrors in high-power lasers. Their high damage threshold, high thermal conductivity, and stability ensure precise laser beam steering and long-term stable system operation.
As substrate materials for MEMS micromirrors or substrates for micro-optical devices, applied in LiDAR, projectors, etc., meeting stringent requirements for high-frequency response, high stability, and miniaturization.
| Parameter Category | Parameter Name | Typical Value/Range |
| Material Characteristics | Primary Material | Ultra-high-purity SiC |
| Density | ~3.0 – 3.2 g/cm³ | |
| Elastic Modulus | >400 GPa | |
| Coefficient of Thermal Expansion | ~4.5×10⁻⁶/℃ | |
| Thermal Conductivity | ~120 – 200 W/(m·K) | |
| Mohs Hardness | 9.5 | |
| Optical & Surface Properties | Surface Roughness (Ra, DSP) | ≤ 0.5 nm |
| Surface Figure Accuracy (PV/RMS) | Up to λ/10 @ 632.8nm or better | |
| Dimensional Characteristics | Common Size Range | Diameter or side length 20–50mm |
| Functional Characteristics | Operating Temperature | -50℃ to 500℃ (or higher, process-dependent) |
2. SiC Ceramic Vacuum Chuck Flip-Chip Bonding Mirror Polishing High-Stiffness
1. Q: How do SiC mirrors work in optics?
A: SiC mirrors function by leveraging silicon carbide's extremely low thermal expansion coefficient (~4.5×10⁻⁶/℃), high thermal conductivity (~120–200 W/m·K), and high stiffness (>400 GPa) to maintain nanoscale surface stability under extreme temperatures and mechanical stress, ensuring minimal distortion in high-precision optical systems like space telescopes or EUV lithography equipment.
2. Q: How does a silicon carbide (SiC) mirror perform in extreme environments?
A: Silicon carbide (SiC) mirrors excel in extreme environments due to their extremely low coefficient of thermal expansion and exceptional thermal stability. For instance, in space applications, they operate reliably across a temperature range from -60°C to 180°C. In automotive LiDAR systems, where engine compartment temperatures can exceed 125°C, SiC mirrors maintain minimal surface deformation. Additionally, their high hardness (Mohs hardness of 9.5) and superior chemical inertness enable effective resistance to vibration, impact, and corrosion from acids or alkalis, ensuring long-term stability under harsh conditions.
Tags: #SiC Mirror, #Customized, #Double-Side Polished, #High-Purity, #Optical Component, #Corrosion-Resistant, #High-Temperature Rated, #MEMS Micromirror
Company Details
Business Type:
Manufacturer,Agent,Importer,Exporter,Trading Company
Year Established:
2013
Total Annual:
1000000-1500000
Ecer Certification：
Verified Supplier
SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components wi... SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components wi...
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